Mazak has extensive experience and achievements in the semiconductor industry, and offers highly reliable system solutions with solid technology and product capabilities.
Semiconductors are essential in various fields such as smartphones, computers, communications, transportation, and healthcare, contributing to the development of our lives and society. With the implementation of new technologies like AI, autonomous driving, and metaverse, there is an increasing need for large-scale and advanced data processing, which is expected to lead to further performance improvement and production expansion.
Semiconductor manufacturing equipment utilizes a wide variety of parts with different shapes and materials. These materials range from stainless steel, iron, and aluminum to challenging materials, such as quartz glass and carbon graphite, which are known as brittle materials that are difficult to process. Processing these materials requires high-quality and advanced processing technology. Mazak has extensive experience and achievements in the semiconductor industry, and offers highly reliable system solutions with solid technology and product capabilities.
Examples of semiconductor industry parts manufactured on Mazak machines
To meet the increasing demand for miniaturization and integration of semiconductors, efforts towards the development of next-generation semiconductor manufacturing technology have been intensifying. Mazak contributes to high-value production by providing precision machining, which is required mainly for the machining of manufacturing equipment parts in the front-end process, machining technologies and chips disposal systems required for difficult-to-machine and brittle materials with excellent corrosion resistance, and automation know-how.
Crucible (quartz glass)
Turbomolecular pump
Heater (carbon/graphite)
Gate valve
Vacuum chamber
Wafer transport arm
Wafer positioning system
Packing plate (cooling plate)
Shower head
Mazak machine tool and automation systems for various parts manufacturing
Brittle material machining
Mazak offers machine tools that are equipped with dustproof measures to prevent the entry of fine chips and sludge generated during the machining of brittle materials such as quartz glass and carbon graphite. We also offer dust collection systems for dry processing and filtration systems for wet processing. Our lineup also includes a wide range of options for mass production processing.
Mazak Mega Turn Series
Vertical CNC turning centers
Highly efficient machining of cylindrical parts such as flange and plates
Mazak FJV Series (BT50)
High-precision double column machining centers
A diverse range of table specifications that are suitable for large workpieces, taking advantage of the double column structure
- Mazak FJV 5 Face-100/120
- Mazak FJV 5 Face-100/160
- Mazak FJV 5 Face-35/120
- Mazak FJV 5 Face-35/60
- Mazak FJV 5 Face-35/80
- Mazak FJV 5 Face-60/120
- Mazak FJV 5 Face-60/160
- Mazak FJV 5 Face-60/80
- Mazak FJV-100/120
- Mazak FJV-100/160
- Mazak FJV-35/120
- Mazak FJV-35/60
- Mazak FJV-35/80
- Mazak FJV-60/120
- Mazak FJV-60/160
- Mazak FJV-60/80
Shaping machining
By using 5-axis machining centers and multi-tasking machines to process the vacuum chamber, turning, milling and shaving can be integrated into a single machine.
Mazak Variaxis i Series
Simultaneous 5-axis vertical machining center
A wide range of parts machining, including chambers, plates, and wafer transport device parts
Mazak Integrex e-V Series
Simultaneous 5-axis vertical multi-tasking machine
Process integration from turning and multi-face machining to 5-axis machining, enabling the additional capability of shaping machining, all within a single machine
Mazak HCN NEO Series
High speed and high precision horizontal machining centers
A wide range of parts processing, including chambers and valve, enabling the additional capability of shaping machining
Machining of complex shapes
Mazak's multi-tasking machine completes the machining of complex-shaped components, such as the impeller of a vacuum pump, in a single setup without the need for process division.
When machining the rotor shaft of a dry pump, processes such as turning and milling can be integrated, significantly reducing lead times.
Mazak Integrex i-H Series
Simultaneous 5-axis horizontal multi-tasking machine
From turning to 5-axis machining using the Y-axis and B-axis, this machine can handle multiple processes
- Mazak Integrex i-100H
- Mazak Integrex i-100H S
- Mazak Integrex i-100H ST
- Mazak Integrex i-200H
- Mazak Integrex i-200H S
- Mazak Integrex i-200H ST
- Mazak Integrex i-250H
- Mazak Integrex i-250H S
- Mazak Integrex i-250H ST
- Mazak Integrex i-350H
- Mazak Integrex i-350H S
- Mazak Integrex i-350H ST
- Mazak Integrex i-450H
- Mazak Integrex i-450H S
- Mazak Integrex i-450H ST
Mazak Integrex e-H Series
Horizontal multi-tasking machine for long and large diameter workpieces
Machines with a large Y-axis stroke, high output turning spindle, and milling spindle for large-scale machining
High-precision machining
The CNC turning centers is capable of machining large diameter workpieces, making it ideal for high-precision machining of cooling plates and other such items. It also has comprehensive measures against vibration and chips, resulting in a high-quality machined surface.
Mazak Quick Turn Series
High-precision 2-axis CNC turning centers
Machines with high-precision spindle and drive system capable of machining surfaces up to Φ490 mm
- Mazak Quick Turn 100MS
- Mazak Quick Turn 100MSY
- Mazak Quick Turn 100MY
- Mazak Quick Turn 200
- Mazak Quick Turn 200MA
- Mazak Quick Turn 200MB
- Mazak Quick Turn 200MSY
- Mazak Quick Turn 200MY
- Mazak Quick Turn 250
- Mazak Quick Turn 250MA
- Mazak Quick Turn 250MB
- Mazak Quick Turn 250MSY
- Mazak Quick Turn 250MY
- Mazak Quick Turn 300
- Mazak Quick Turn 300MA
- Mazak Quick Turn 300MB
- Mazak Quick Turn 300MY
- Mazak Quick Turn 350
- Mazak Quick Turn 350MA
- Mazak Quick Turn 350MB
- Mazak Quick Turn 350MY
- Mazak Quick Turn 400
- Mazak Quick Turn 400M
- Mazak Quick Turn 450
- Mazak Quick Turn 450M
Smooth Oscillation Cutting
Smooth Oscillation Cutting cuts chips into small pieces to protect the machine and workpiece surfaces and reduce problems caused by chips. It is the perfect choice for automated chip disposal. The Smooth Oscillation Cutting conditions are automatically determined by MAZATROL.
Mazak Integrex i-H Series
Simultaneous 5-axis horizontal multi-tasking machine
From turning to 5-axis machining using the Y-axis and B-axis, this one machine can handle multiple processes
- Mazak Integrex i-100H
- Mazak Integrex i-100H S
- Mazak Integrex i-100H ST
- Mazak Integrex i-200H
- Mazak Integrex i-200H S
- Mazak Integrex i-200H ST
- Mazak Integrex i-250H
- Mazak Integrex i-250H S
- Mazak Integrex i-250H ST
- Mazak Integrex i-350H
- Mazak Integrex i-350H S
- Mazak Integrex i-350H ST
- Mazak Integrex i-450H
- Mazak Integrex i-450H S
- Mazak Integrex i-450H ST
Mazak Integrex i-V Series
Simultaneous 5-axis vertical multi-tasking machine
Process integration from turning to multi-face machining and 5- axis machining into one machine
Automation systems
Mazak offers one-stop solutions for automation systems that cover everything from mass production to high-mix, low-volume production, linking with robots, and unique system software.
The systems enable long-term continuous operation with stable accuracy.
The systems are also equipped with functions such as measurement and chip and coolant control.
Mazak Palletech and Multi Pallet Pool systems
Automation systems using 5-axis machining centers with turning function and horizontal machining centers
Different types of machine models can be integrated into a single system for machining a wide variety of workpieces