Mazak machining solutions for the Semiconductor industry

Mazak has extensive experience and achievements in the semiconductor industry, and offers highly reliable system solutions with solid technology and product capabilities.

Mazak machining solutions for the semiconductor industry

 

Semiconductors are essential in various fields such as smartphones, computers, communications, transportation, and healthcare, contributing to the development of our lives and society. With the implementation of new technologies like AI, autonomous driving, and metaverse, there is an increasing need for large-scale and advanced data processing, which is expected to lead to further performance improvement and production expansion.

Semiconductor manufacturing equipment utilizes a wide variety of parts with different shapes and materials. These materials range from stainless steel, iron, and aluminum to challenging materials, such as quartz glass and carbon graphite, which are known as brittle materials that are difficult to process. Processing these materials requires high-quality and advanced processing technology. Mazak has extensive experience and achievements in the semiconductor industry, and offers highly reliable system solutions with solid technology and product capabilities.

 

Examples of semiconductor industry parts manufactured on Mazak machines

To meet the increasing demand for miniaturization and integration of semiconductors, efforts towards the development of next-generation semiconductor manufacturing technology have been intensifying. Mazak contributes to high-value production by providing precision machining, which is required mainly for the machining of manufacturing equipment parts in the front-end process, machining technologies and chips disposal systems required for difficult-to-machine and brittle materials with excellent corrosion resistance, and automation know-how.

semiconductor workpiece quartz glass crucible

Crucible (quartz glass)

semiconductor workpiece turbomolecular pump

Turbomolecular pump

semiconductor workpiece carbon graphite heater

Heater (carbon/graphite)

 

semiconductor workpiece gate valve

Gate valve

semiconductor workpiece vacuum chamber

Vacuum chamber

semiconductor workpiece wafer transport arm

Wafer transport arm

 

semiconductor workpiece wafer positioning system

Wafer positioning system

semiconductor workpiece packing plate

Packing plate (cooling plate)

semiconductor workpiece shower head

Shower head

 

Mazak machine tool and automation systems for various parts manufacturing

 

Brittle material machining

Mazak offers machine tools that are equipped with dustproof measures to prevent the entry of fine chips and sludge generated during the machining of brittle materials such as quartz glass and carbon graphite. We also offer dust collection systems for dry processing and filtration systems for wet processing. Our lineup also includes a wide range of options for mass production processing.

 

 

 

Shaping machining

By using 5-axis machining centers and multi-tasking machines to process the vacuum chamber, turning, milling and shaving can be integrated into a single machine.

 

Mazak Variaxis i Series

Mazak Variaxis i 700 NEO

Mazak Integrex e-V Series

Mazak Integrex e 1250V 8

Simultaneous 5-axis vertical multi-tasking machine

Process integration from turning and multi-face machining to 5-axis machining, enabling the additional capability of shaping machining, all within a single machine

 

Mazak HCN NEO Series

Mazak HCN 5000 NEO

High speed and high precision horizontal machining centers

A wide range of parts processing, including chambers and valve, enabling the additional capability of shaping machining

 

 

 

Machining of complex shapes

Mazak's multi-tasking machine completes the machining of complex-shaped components, such as the impeller of a vacuum pump, in a single setup without the need for process division.

When machining the rotor shaft of a dry pump, processes such as turning and milling can be integrated, significantly reducing lead times.

 

Mazak Integrex e-H Series

Mazak Integrex e 670H

Horizontal multi-tasking machine for long and large diameter workpieces

Machines with a large Y-axis stroke, high output turning spindle, and milling spindle for large-scale machining

 

 

High-precision machining

The CNC turning centers is capable of machining large diameter workpieces, making it ideal for high-precision machining of cooling plates and other such items. It also has comprehensive measures against vibration and chips, resulting in a high-quality machined surface.

 

 

 

Smooth Oscillation Cutting

Smooth Oscillation Cutting cuts chips into small pieces to protect the machine and workpiece surfaces and reduce problems caused by chips. It is the perfect choice for automated chip disposal. The Smooth Oscillation Cutting conditions are automatically determined by MAZATROL.

 

Mazak Integrex i-V Series

Mazak Integrex i 630V 6

Simultaneous 5-axis vertical multi-tasking machine

Process integration from turning to multi-face machining and 5- axis machining into one machine

 

Automation systems

Mazak offers one-stop solutions for automation systems that cover everything from mass production to high-mix, low-volume production, linking with robots, and unique system software.

The systems enable long-term continuous operation with stable accuracy.

The systems are also equipped with functions such as measurement and chip and coolant control.

 

Mazak Palletech and Multi Pallet Pool systems

Mazak Palletech and Multi Pallet Pool automation systems

Automation systems using 5-axis machining centers with turning function and horizontal machining centers

Different types of machine models can be integrated into a single system for machining a wide variety of workpieces